Vacuum pump inlet trap

A modular, high-capacity vacuum pump inlet trap for new or retrofit installation with 300 mm wafer fabricators and processes such as nitride, TEOS, TiN, ALO3 and BPSG that generate large amounts of heavy particulates has been introduced by MV Products.

The MV Multi-Trap 16" Vacuum Inlet Trap features a first stage knock-down baffle, multiple stages of user-selectable filtration, and can be equipped with a cooling option for condensables. Developed for processes that create large amounts of heavy particulates, this modular, clamp-together trap can be stacked to accumulate up to 40,968 cm3 of solids, depending on material.

Providing up to six stages of replaceable filter elements, the Trap is available with stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb and other media to remove residual solvent vapour acids and particulates. Filter elements are offered 11.4 and 22.9 cm tall and the traps are made of 304 stainless steel.